Variable-Energy Positron Annihilation as Highly Sensitive Nanoporosimetry for Porous Thin Films
نویسندگان
چکیده
Positron annihilation was applied to measuring critical pore sizes in various materials. In recent years, positron annihilation with a variable-energy positron beam has emerged as a powerful tool for the investigation of porous thin films synthesized as low-k dielectrics, high performance gas sensor materials, and so on. This paper is a brief overview of recent progress in nanopore characterization of thin films by means of positron annihilation with a description of several important issues relevant to positron annihilation.
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